 |
||||
 |
||||
 |
||||
 |
||||
 |
||||
 |
||||
More
links:
|
||||
| |
> Systems & Process Solutions
Process ready
solutions
for deposition, etching Precursor
delivery Sub-systems Custom Vacuum
chamber| Process ready
solutions
for deposition / etching Factory test and pre-qualified vacuum reactor chambers for various deposition plasma processes: Plasma
Enhanced Chemical
Vapour Deposition (PECVD) Physical
Vapour Deposition (PVD) /Sputtering Reactive
Ion Etching (RIE) |
|
| Non-plasma
reactor
chambers and modules also available: Atomic
Layer Deposition (ALD) Thermal
Evaporation Custom design, fabrication, integration and test of assemblies and modules ready for “plug and play” with any mainframe or  E21
style cluster tool configuration. Full qualification
to customer specifications. |
|
|
|
|
|
Custom vacuum
chamber
With vast experience in various process chamber and reactor cell design we can prepare custom designs to meet the most demanding processing conditions: Specialist in large
vacuum
chamber (>
200L) fabrication.. True UHV
system (<5E-10 mbar,
bakeable to 200 Deg C). Optimised
chamber designs in relation
to conductance and gas
loading to ensure the most cost effective pumping
system selection. Ambient
and pressure control systems
design to deliver any
specific processing conditions i.e. <1ppm O2 or H20.We
will recommend best
pumping solutions for your process taking into account your
requirements, gas loads and conductance in order to achieve
vacuum levels ranging from rough vacuum to UHV.
|
  |
|
|
|
| Ultra
High
Purity precursor
delivery sub-systems. . Fully Qualified to customer specifictions . Design, assembly and integration of subsystems . Instruments selection i.e. MFCs, MFM, valving and manifolds. . Flow measurement and control . Up-stream / Down-stream vacuum pressure control . RGA and other ambient control
compliant, S2, E49, F1, F2, etc |
 |
|
|
|
Product
development,Engineering & Design for commercialisation |
|
|
9s Eng team has a succesful record in turning proof of concept technology into commercial products and production ready manufacturing equipment. We have succesfully managed a number of projects for various application ranging from analytical instruments to semi-conductor manufacturing equipment. If you think you are at this stage, take the next step and contact us, we can deliver pre-commercial product. Contact us now to discuss your concept ! |
|
