|
Custom vacuum chamber With vast experience in various process chamber and reactor cell design we can prepare custom designs to meet the most demanding processing conditions: Specialist in large vacuum chamber (> 200L) fabrication.. True UHV system (<5E-10 mbar, bakeable to 200 Deg C). Optimised chamber designs in relation to conductance and gas loading to ensure the most cost effective pumping system selection. Ambient and pressure control systems design to deliver any specific processing conditions i.e. <1ppm O2 or H20. We
will recommend best
pumping solutions for your process taking into account your
requirements, gas loads and conductance in order to achieve
vacuum levels ranging from rough vacuum to UHV.
Exemple of vacuum process
chambers (click
to enlarge)
|
|||||||||||||